Metrological aspects of measuring resistance of Ohmic contacts
DOI:
https://doi.org/10.3103/S0735272710030015Keywords:
Оhmic contact, contact resistivity, Cox-Strack method, Kelvin method, interface probing method, TLM method, relative measurement errorAbstract
Modern methods of measuring resistance of ohmic contacts are considered in the review: Cocks-Strack, transmission line, Kelvin, boundary probing. Examples of their application are provided and errors of measuring the contact resistivity are calculated. The most accurate measuring methods are the Kelvin method and the boundary probing method, while the least accurate one is the Cocks-Strack method. Requirements and possibilities of their application are specified.
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