Dynamic simulation of electrostatically controlled MEMS-capacitors in the operating temperature range (293…323) K
DOI:
https://doi.org/10.3103/S073527270805004XAbstract
A dynamic model of the microelectromechanical (MEMS) capacitor with electrostatic control has been proposed. This model is based on the A.A. Kharkevich multisided transducer theory with due regard for the thermal impact. A two-electrode capacitive MEMS-transducer was simulated and dynamic relationships of the electrode travel and capacitance (as well as the actuation time of the device) were determined at ambient temperatures in the range (293…323) K. The dynamic characteristic of mechanical resistance of the system has been also derived and analyzed with due regard for the working temperature and parameters of MEMS-capacitor.
References
A. Dec and K. Suyama, “Micromachined Electro–Mechanically Tunable Capacitors and Their Applications to RF IC’s,” IEEE Trans. Microwave Theory Tech. 46, No. 12, 2587 (1998).
B. Courtois, TIMA Laboratory. Annual Report 1997 (May 1998).
F. F. Kolpakov and N. G. Borzyak, “Thermal Simulation of MEMS-Capacitor with Electrostatic Control,” Visnyk tekhnol. un-tu Podillya, Part 1, Vol. 2. Engineering Sciences, Khmel’nyts’kyi, No. 4, 37 (2005).
F. F. Kolpakov and N. G. Borzyak, “Quasi-Static Characteristics of the System of Two-Electrode MEMS-Capacitors,” Radiotekhnika 148, 245 (2007).
http:www.microfabrica.com.
http:www.corning.com.
J. R. Gilbert, R. Legtenberg, and S. D. Senturia, “3D Coupled Electro–Mechanics for MEMS: Applications of CoSolve–EM,” MEMS’95, 122 (1995).
V. N. Lantsov, O. V. Rudakov, and S. V. Maskeev, The Current Survey of the Field of Microelectromechanical System Design (BGU, Vladimir, 1999) [in Russian].
A. A. Kharkevich, Theory of Electroacoustic Transducers. Selected Studies in 3 vols., Vol. 1 (Nauka, Moscow, 1973) [in Russian].
Mathematical Encyclopedia in 5 vols., Vol. 5 (Sov. Entsiklop., Moscow, 1977–1985) [in Russian].
