Influence of anisotropy of single-crystalline silicon on dynamic characteristics of microelectromechanical resonators

Authors

  • Irina Anatolyevna Kirshina Saint Petersburg State University of Aerospace Instrumentation, Russian Federation
  • Pavel Aleksandrovich Okin Saint Petersburg State University of Aerospace Instrumentation, Russian Federation
  • Oleg Mikhaylovich Filonov Saint Petersburg State University of Aerospace Instrumentation, Russian Federation

DOI:

https://doi.org/10.3103/S0735272714110065

Keywords:

microelectromechanical resonator, sensitivity of oscillatory system, dynamic characteristics, single-crystalline silicon

Abstract

It is represented a comparative analysis of topological solutions at the stage of microelectromechanical resonators design. It is researched dependence of sensitivity of oscillating system on its orientation regarding basic crystallographic axis. We developed the requirements of selection of planar construction topology dependently on the devices purpose.

References

FILONOV, O.M.; KIRSHINA, I.A.; OKIN, P.A. Specificities of design of sensitive elements of MEMS with resonance measuring converters. Proc. of IV Int. Sci. Practical Conf. on Fundamental and Applied Researches in Modern World, December 2013, St. Petersburg, Russia. St. Petersburg, 2013, p.37-39.

GRIDCHIN, V.A.; DRAGANOV, V.P. Physics of Integrated Circuits. Novosibirsk: NGTU, 2004 [in Russian].

TIMOSHENKO, S.P. Oscillations in Engineering. Moscow: Mashinostroyeniye, 1985 [in Russian].

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Published

2014-11-16

Issue

Vol. 57 No. 11 (2014): Special issue of SUAI

Section

Research Articles