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Calculation of self-resonant frequencies of membrane structures with help of schematic design program package

A. I. Petrenko, V. V. Ladogubets, O. Yu. Beznosyk, O. D. Finogenov, O. V. Tchkalov


It is proposed an application of finite-element mathematical model for obtaining of equivalent electrical circuit by mechanical components substitution. To reduce dimension of obtained circuits we propose to use RLC reduction. It is considered an example of equivalent electrical circuit of micro accelerometer obtain. Mentioned approach is spread to equivalent circuits of MEMS components obtaining.

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