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Dynamic simulation of electrostatically controlled MEMS-capacitors in the operating temperature range (293…323) K

F. F. Kolpakov, N. G. Borzyak


A dynamic model of the microelectromechanical (MEMS) capacitor with electrostatic control has been proposed. This model is based on the A.A. Kharkevich multisided transducer theory with due regard for the thermal impact. A two-electrode capacitive MEMS-transducer was simulated and dynamic relationships of the electrode travel and capacitance (as well as the actuation time of the device) were determined at ambient temperatures in the range (293…323) K. The dynamic characteristic of mechanical resistance of the system has been also derived and analyzed with due regard for the working temperature and parameters of MEMS-capacitor.

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