DOI: https://doi.org/10.3103/S0735272719060013
Open Access Open Access  Restricted Access Subscription Access
Distribution of electric field in electrode system of HGD conical electron gun

Modeling of electron sources for high voltage glow discharge forming profiled electron beams

Igor V. Melnyk, Alina V. Pochynok

Abstract


The methodology of simulation of high voltage glow discharge electrodes’ systems with anode plasma, formed the profile electron beams with the ring-like focus, is considered in the article. The universality of proposed model is confirmed by the fact, that the slope angle of generatrix line of conic anode surface correspond to the axis of the electrodes system have been chosen as one of model parameters. Such novel solution has led to simulating the different types of electrodes’ systems, which form the profiled electron beams. The position of plasma boundary in considered high voltage glow discharge electrodes’ systems is firstly calculated on the basis of one-dimensional model of discharge gap, and after that recalculated with taking into account the real geometry of electrodes’ system. Such approach allows to significantly simplify the proposed mathematical model and to avoid using the sophisticated iteration numerical methods for defining plasma boundary form and position without decreasing the accuracy of simulation results. The results of simulation of plasma boundary position are compared with obtained experimental data and disagreement between simulation and experimental results is nearly 10–15%. The results of simulation of distribution of electric field in the cathode-fall region as well as results of simulation of distribution of beam current density in the ring-like focus of formed hollow electron beam are presented in the article. The simplicity and universality are the main advantages of the proposed model.

Keywords


glow discharge electron gun; high voltage glow discharge; anode plasma; profile electron beam

Full Text:

PDF

References


LADOKHIN, S.V.; LEVITSKY, N.I.; CHERNYAVSKY, V.B.; ET AL. Electron Beam Melting in Foundry Production [in Russian]. Kyiv: Stal, 2007.

ZAVYALOV, M.A.; KREYNDEL, Yu.E.; NOVIKOV, A.A.; SHANTURIN, L.P. Plasma Processes in Technological Electronic Guns [in Russian]. Moscow: Energoatomizdat, 1989.

GRECHANYUK, M.I.; MELNYK, A.G.; GRECHANYUK, I.M.; MELNYK, V.G.; KOVALCHUK, D.V. “Modern electron beam technologies and equipment for melting of metals and alloys, deposition of protective coatings, production of composites condensed from vapor phase and powders,” Elektrotechnica and Electronica (E + E), v.49, n.5-6, p.115, 2014. URI: https://epluse.ceec.bg/modern-electron-beam-technologies-and-equipment-for-melting-of-metals-and-alloys-deposition-of-protective-coatinfor-production-of-composites-condensed-from-vapor-phase-and-powders/.

MATTAUSCH, G.; ZIMMERMANN, B.; FIETZKE, F.; HEINB, J.-P.; GRAFFEL, B.; WINKLER, F.; ROEGNER, F.-H.; METZNER, C. “Gas discharge electron sources – proven and novel tools for thin-film technologies,” Elektrotechnica and Electronica (E + E), v.49, n.5-6, p.183, 2014. URI: https://epluse.ceec.bg/gas-discharge-electron-sources-proven-and-novel-tools-for-thin-film-technologies/.

FEINAEUGLE, P.; MATTAUSCH, G.; SCHMIDT, S.; ROEGNER, F.-H. “A new generation of plasma-based electron beam sources with high power density as a novel tool for high-rate PVD,” Proc. of 54-th Annual Tech. Conf. on Society of Vacuum Coaters, Chicago. 2011, p.202-209.

MATTAUSCH, G.; SCHEFFEL, B.; ZYWITZKI, O.; METZNER, C.; ROEGNER, F.H. “Technologies and tools for the plasma-activated EB high-rate deposition of Zirconia,” Elektrotechnica and Electronica, v.47, n.5-6, p.152, 2012.

DENBNOVETSKY, S.V.; MELNYK, V.G.; MELNYK, I.V. “High-voltage glow-discharge electron sources and possibilities of its application in industry for realizing of different technological operations,” IEEE Trans. Plasma Science, v.31, n.5, p.987, Oct. 2003. DOI: https://doi.org/10.1109/tps.2003.818444.

DENBNOVETSKIY, S.; MELNYK, I.; MELNYK, V.; TUGAI, B.; TUHAI, S.; WУJCIK, W.; LAWICKI, T.; ASSAMBAY, A.; LUGANSKAYA, S. “Principles of operation of high voltage glow discharge electron guns and some possibilities of their technological application,” Proc. SPIE. The Int. Society Optical Engineering, 2017. p.10445-10455. DOI: https://doi.org/10.1117/12.2280736.

EFIMOVA, V.V.; VORONOV, M.V.; HOFFMANN, V.; ECKERT, J. “Electrical properties of pulsed glow discharge. Two new aspects,” Publ. Astron. Obs. Belgrade, v.84, p.369, 2008. URI: http://adsabs.harvard.edu/full/2008POBeo..84..369E.

FU, Ricky K.Y.; CHU, P.K.; TIAN, X.B.; YANG, S.Q. “Ignition and dynamics of high-voltage glow discharge plasma implantation,” Nuclear Instruments and Methods in Physics Res. B, v.242, n.1-2, p.275, 2006. DOI: https://doi.org/10.1016/j.nimb.2005.08.033.

TIAN, X.B.; PENG, P.; CHU, P.K. “Enhancement of process efficacy using seed plasma in pulsed high-voltage glow-discharge plasma implantation,” Phys. Lett. A, v.303, n.1, p.67, Oct. 2002. DOI: https://doi.org/10.1016/s0375-9601(02)01234-3.

TIAN, X.B.; CHU, P.K. “Experimental investigation of the electrical characteristics and initiation dynamics of pulsed high-voltage glow discharge,” J. Physics D: Appl. Phys., v.34, n.3, p.354, 2001. DOI: https://doi.org/10.1088/0022-3727/34/3/318.

TIAN, X.; CHU, P.K. “Biased Langmuir probe measurement for pulsed high-voltage glow discharge,” Abstracts of IEEE PPPS-2001. Pulsed Power Plasma Science Conf. 2001, 17-22 Jun. 2001, Las Vegas, USA. IEEE, 2001, p.91-92. DOI: https://doi.org/10.1109/ppps.2001.961112.

CHENGLONG, Y.; INGENERI, K.; HARRISON, W.W. “A pulsed Grimm glow discharge as an atomic emission source,” J. Analytical Atomic Spectrometry, n.4, p.693, 1999. DOI: https://doi.org/10.1039/a807204c.

MELNYK, I.V. “Simulation of geometry of high voltage glow discharge electrodes’ systems, formed profile electron beams,” Proc. SPIE, v.6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, p.627809-1-627809-13, 2006. DOI: https://doi.org/10.1117/12.693202.

DENBNOVETSKY, S.V.; FELBA, J.; MELNIK, V.I.; MELNIK, I.V. “Model of beam formation in a glow discharge electron gun with a cold cathode,” Appl. Surface Science, v.111, p.288, 1997. DOI: https://doi.org/10.1016/s0169-4332(96)00761-1.

HOCKNEY, R.W.; EASTWOOD, J.W. Computer Simulation Using Particles. CRC Press, 1988. URI: https://www.crcpress.com/Computer-Simulation-Using-Particles/Hockney-Eastwood/p/book/9780852743928.

BRONSTEIN, I.N.; SEMENDYAEV, K.A. Reference Book on Mathematics for Engineers and Students of Higher Education Institutions [in Russian]. Moscow: Nauka, 1981.

SZILGYI, M. Electron and Ion Optics. New York: Plenum Press, 1988.

MATHEWS, J.H.; FINK, K.D. Numerical Methods. Using MATLAB, 3rd ed. NJ: Prentice Hall, 1999.

RAYZER, Yu.P. Physics of Gas Discharge [in Russian]. Moscow: Nauka, 1987.







© Radioelectronics and Communications Systems, 2004–2019
When you copy an active link to the material is required
ISSN 1934-8061 (Online), ISSN 0735-2727 (Print)
tel./fax +38044 204-82-31, 204-90-41